Fundamentals of semiconductor fabrication /
May, Gary S.
Fundamentals of semiconductor fabrication / by Gary S. May, Simon M. Sze. - New Delhi : Wiley, c2004. - xiii, 305 p. : ill. ; 26 cm.
Includes bibliographical references and index.
CONTENTS
Chapter 1: Introduction
Chapter 2: Crystal growth
Chapter 3: Silicon oxide
Chapter 4: Photo Lithography
Chapter 5: Etching
Chapter 6: Diffusion
Chapter 7: Ion implantation
Chapter 8: Film deposition
Chapter 9: Process integration
Chapter 10: IC manufacturing
Chapter 11: Future trends and challenges
9788126532605 (pbk)
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
621.3815 / MAY-F 2011 3822
Fundamentals of semiconductor fabrication / by Gary S. May, Simon M. Sze. - New Delhi : Wiley, c2004. - xiii, 305 p. : ill. ; 26 cm.
Includes bibliographical references and index.
CONTENTS
Chapter 1: Introduction
Chapter 2: Crystal growth
Chapter 3: Silicon oxide
Chapter 4: Photo Lithography
Chapter 5: Etching
Chapter 6: Diffusion
Chapter 7: Ion implantation
Chapter 8: Film deposition
Chapter 9: Process integration
Chapter 10: IC manufacturing
Chapter 11: Future trends and challenges
9788126532605 (pbk)
Semiconductors--Design and construction.
Integrated circuits--Design and construction.
621.3815 / MAY-F 2011 3822