VLSI fabrication principles : (Record no. 2620)

MARC details
000 -LEADER
fixed length control field 01166cam a2200253 a 4500
003 - CONTROL NUMBER IDENTIFIER
control field OSt
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20200121043640.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 931007s1994 nyua g b 001 0 eng
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9788126517909 (pbk)
040 ## - CATALOGING SOURCE
Transcribing agency NCL
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815
Item number GHA-V 2013 3801
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Ghandhi, Sorab Khushro,
Dates associated with a name 1928-
245 10 - TITLE STATEMENT
Title VLSI fabrication principles :
Remainder of title silicon and gallium arsenide /
Statement of responsibility, etc. Sorab K. Ghandhi.
250 ## - EDITION STATEMENT
Edition statement 2nd ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. New York :
Name of publisher, distributor, etc. Wiley,
Date of publication, distribution, etc. c1994.
300 ## - PHYSICAL DESCRIPTION
Extent xxiv, 834 p. :
Other physical details ill. ;
Dimensions 25 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
505 ## - FORMATTED CONTENTS NOTE
Formatted contents note CONTENTS<br/>Chapter 1: Material Properties<br/>Chapter 2: Phase diagrams and solid stability<br/>Chapter 3: Crystal growth and doping<br/>Chapter 4: Diffusion<br/>Chapter 5: Epitaxy<br/>Chapter 6: Ion Implantation<br/>Chapter 7: Native Films<br/>Chapter 8: Deposited films<br/>Chapter 9: Etching and cleaning<br/>Chapter 10: Lithographic process<br/>Chapter 11: Device and Circuit fabrication<br/>
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Integrated circuits
General subdivision Very large scale integration.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Silicon.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Gallium arsenide.
740 0# - ADDED ENTRY--UNCONTROLLED RELATED/ANALYTICAL TITLE
Uncontrolled related/analytical title Very large scale integration fabrication principles.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Koha item type Books
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Source of acquisition Cost, normal purchase price Inventory number Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type
          Namal Library Namal Library Electrical Engineering 01/01/2014 Allied book company 929.30 Bill No. 2984   621.3815 GHA-V 2013 3801 0003801 01/01/2014 01/01/2014 Books