Fundamentals of semiconductor fabrication / (Record no. 2637)

MARC details
000 -LEADER
fixed length control field 01037cam a22002297a 4500
003 - CONTROL NUMBER IDENTIFIER
control field OSt
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20200129063218.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 030811s2004 ii a g b 001 0 eng d
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9788126532605 (pbk)
040 ## - CATALOGING SOURCE
Transcribing agency NCL
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.3815
Item number MAY-F 2011 3822
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name May, Gary S.
245 1# - TITLE STATEMENT
Title Fundamentals of semiconductor fabrication /
Statement of responsibility, etc. by Gary S. May, Simon M. Sze.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. New Delhi :
Name of publisher, distributor, etc. Wiley,
Date of publication, distribution, etc. c2004.
300 ## - PHYSICAL DESCRIPTION
Extent xiii, 305 p. :
Other physical details ill. ;
Dimensions 26 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
505 ## - FORMATTED CONTENTS NOTE
Formatted contents note CONTENTS<br/>Chapter 1: Introduction<br/>Chapter 2: Crystal growth<br/>Chapter 3: Silicon oxide<br/>Chapter 4: Photo Lithography<br/>Chapter 5: Etching<br/>Chapter 6: Diffusion<br/>Chapter 7: Ion implantation<br/>Chapter 8: Film deposition<br/>Chapter 9: Process integration<br/>Chapter 10: IC manufacturing<br/>Chapter 11: Future trends and challenges
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Semiconductors
General subdivision Design and construction.
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Integrated circuits
General subdivision Design and construction.
700 1# - ADDED ENTRY--PERSONAL NAME
Personal name Sze, S. M.,
Dates associated with a name 1936-
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Koha item type Books
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Source of acquisition Cost, normal purchase price Inventory number Total Checkouts Full call number Barcode Date last seen Date checked out Price effective from Koha item type
          Namal Library Namal Library Electrical Engineering 01/01/2014 allied book company 720.65 Bill No. 2984 1 621.3815 MAY-F 2011 3822 0003822 07/01/2015 03/04/2015 01/01/2014 Books