Fundamentals of semiconductor fabrication / (Record no. 2637)
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000 -LEADER | |
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fixed length control field | 01037cam a22002297a 4500 |
003 - CONTROL NUMBER IDENTIFIER | |
control field | OSt |
005 - DATE AND TIME OF LATEST TRANSACTION | |
control field | 20200129063218.0 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
fixed length control field | 030811s2004 ii a g b 001 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
International Standard Book Number | 9788126532605 (pbk) |
040 ## - CATALOGING SOURCE | |
Transcribing agency | NCL |
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 621.3815 |
Item number | MAY-F 2011 3822 |
100 1# - MAIN ENTRY--PERSONAL NAME | |
Personal name | May, Gary S. |
245 1# - TITLE STATEMENT | |
Title | Fundamentals of semiconductor fabrication / |
Statement of responsibility, etc. | by Gary S. May, Simon M. Sze. |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication, distribution, etc. | New Delhi : |
Name of publisher, distributor, etc. | Wiley, |
Date of publication, distribution, etc. | c2004. |
300 ## - PHYSICAL DESCRIPTION | |
Extent | xiii, 305 p. : |
Other physical details | ill. ; |
Dimensions | 26 cm. |
504 ## - BIBLIOGRAPHY, ETC. NOTE | |
Bibliography, etc | Includes bibliographical references and index. |
505 ## - FORMATTED CONTENTS NOTE | |
Formatted contents note | CONTENTS<br/>Chapter 1: Introduction<br/>Chapter 2: Crystal growth<br/>Chapter 3: Silicon oxide<br/>Chapter 4: Photo Lithography<br/>Chapter 5: Etching<br/>Chapter 6: Diffusion<br/>Chapter 7: Ion implantation<br/>Chapter 8: Film deposition<br/>Chapter 9: Process integration<br/>Chapter 10: IC manufacturing<br/>Chapter 11: Future trends and challenges |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Semiconductors |
General subdivision | Design and construction. |
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical term or geographic name as entry element | Integrated circuits |
General subdivision | Design and construction. |
700 1# - ADDED ENTRY--PERSONAL NAME | |
Personal name | Sze, S. M., |
Dates associated with a name | 1936- |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Source of classification or shelving scheme | |
Koha item type | Books |
Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Cost, normal purchase price | Inventory number | Total Checkouts | Full call number | Barcode | Date last seen | Date checked out | Price effective from | Koha item type |
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Namal Library | Namal Library | Electrical Engineering | 01/01/2014 | allied book company | 720.65 | Bill No. 2984 | 1 | 621.3815 MAY-F 2011 3822 | 0003822 | 07/01/2015 | 03/04/2015 | 01/01/2014 | Books |