VLSI fabrication principles : silicon and gallium arsenide / Sorab K. Ghandhi.

By: Ghandhi, Sorab Khushro, 1928-Material type: TextTextPublisher: New York : Wiley, c1994Edition: 2nd edDescription: xxiv, 834 p. : ill. ; 25 cmISBN: 9788126517909 (pbk)Subject(s): Integrated circuits -- Very large scale integration | Silicon | Gallium arsenideDDC classification: 621.3815
Contents:
CONTENTS Chapter 1: Material Properties Chapter 2: Phase diagrams and solid stability Chapter 3: Crystal growth and doping Chapter 4: Diffusion Chapter 5: Epitaxy Chapter 6: Ion Implantation Chapter 7: Native Films Chapter 8: Deposited films Chapter 9: Etching and cleaning Chapter 10: Lithographic process Chapter 11: Device and Circuit fabrication
Tags from this library: No tags from this library for this title. Log in to add tags.
    Average rating: 0.0 (0 votes)
Item type Current location Call number Status Date due Barcode Item holds
Books Books Namal Library
Electrical Engineering
621.3815 GHA-V 2013 3801 (Browse shelf) Available 0003801
Total holds: 0

Includes bibliographical references and index.

CONTENTS
Chapter 1: Material Properties
Chapter 2: Phase diagrams and solid stability
Chapter 3: Crystal growth and doping
Chapter 4: Diffusion
Chapter 5: Epitaxy
Chapter 6: Ion Implantation
Chapter 7: Native Films
Chapter 8: Deposited films
Chapter 9: Etching and cleaning
Chapter 10: Lithographic process
Chapter 11: Device and Circuit fabrication

There are no comments on this title.

to post a comment.
اردو کى بورڈ