Fundamentals of semiconductor fabrication / by Gary S. May, Simon M. Sze.

By: May, Gary SContributor(s): Sze, S. M, 1936-Material type: TextTextPublisher: New Delhi : Wiley, c2004Description: xiii, 305 p. : ill. ; 26 cmISBN: 9788126532605 (pbk)Subject(s): Semiconductors -- Design and construction | Integrated circuits -- Design and constructionDDC classification: 621.3815
Contents:
CONTENTS Chapter 1: Introduction Chapter 2: Crystal growth Chapter 3: Silicon oxide Chapter 4: Photo Lithography Chapter 5: Etching Chapter 6: Diffusion Chapter 7: Ion implantation Chapter 8: Film deposition Chapter 9: Process integration Chapter 10: IC manufacturing Chapter 11: Future trends and challenges
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Item type Current location Call number Status Date due Barcode Item holds
Books Books Namal Library
Electrical Engineering
621.3815 MAY-F 2011 3822 (Browse shelf) Available 0003822
Total holds: 0

Includes bibliographical references and index.

CONTENTS
Chapter 1: Introduction
Chapter 2: Crystal growth
Chapter 3: Silicon oxide
Chapter 4: Photo Lithography
Chapter 5: Etching
Chapter 6: Diffusion
Chapter 7: Ion implantation
Chapter 8: Film deposition
Chapter 9: Process integration
Chapter 10: IC manufacturing
Chapter 11: Future trends and challenges

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