Microsystem design / Stephen D. Senturia.
Material type:
TextPublication details: New Delhi : Springer, 2001Description: xxvi, 689 p. : ill. ; 24 cmISBN: 9788181285461 (pbk)Subject(s): Microelectromechanical systems -- Design and construction | System design | MicroelectronicsDDC classification: 621.381 | Item type | Current library | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|
Books
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Namal Library Electrical Engineering | 621.381 SEN-M 2001 4301 (Browse shelf (Opens below)) | Available | 0004301 |
Includes bibliographical references (p. [665]-676) and index.
CONTENTS
Chapter 1: Introduction
Chapter 2: An Approach to MEMS Design
Chapter 3: Micro-fabrication
Chapter 4: Process Integration
Chapter 5: Lumped Modeling
Chapter 6: Energy Conserving Transducers
Chapter 7: Dynamics
Chapter 8: Elasticity
Chapter 9: Structures
Chapter 10: Energy Methods
Chapter 11: Dissipation and the Thermal Energy Domain
Chapter 12: Lumped Modeling of Dissipation Process
Chapter 13: Fluids
Chapter 14: Electronics
Chapter 15: Feedback System
Chapter 16: Noise
Chapter 17: Packaging
Chapter 18: A Piezoresistive Pressure Sensor
Chapter 19: A Capacitive Accelerator
Chapter 20: Electrostatic Projection Display
Chapter 21: A Piezoelectric Rate Gyroscope
Chapter 22: DNA Amplification
Chapter 23:A Micro-bridge Gas Sensor
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