Foundations of MEMS / by Chang Liu.
Material type:
TextPublication details: New Delhi : Pearson Education, 2013Edition: 2nd edDescription: 576 p. : ill. ; 24 cmISBN: 9788131764756(pbk)Subject(s): Microelectromechanical systemsDDC classification: 621.381 | Item type | Current library | Call number | Status | Date due | Barcode | Item holds |
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Namal Library Electrical Engineering | 621.381 LIU-F 2013 3999 (Browse shelf (Opens below)) | Available | 0003999 | ||
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Books
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Namal Library Electrical Engineering | 621.381 LIU-F 2012 2778 (Browse shelf (Opens below)) | Available | 0002778 |
Includes bibliographical references and index.
CONTENTS
Chapter 1: Introduction
Chapter 2: First Pass Introduction to Micro-fabrication
Chapter 3: Review of Essential Electrical and Mechanical concepts
Chapter 4: Electrostatic Sensing and Actuation
Chapter 5: Thermal Sensing and Actuation
Chapter 6: Piezoresistive Sensors
Chapter 7: Piezoelectric Sensing and Actuation
Chapter 8: Magnetic Actuation
Chapter 9: Summary of Sensing and Actuation Methods
Chapter 10: Bulk Micro-machining and Silicon An isotropic Etching
Chapter 11: Surface Micro-machining
Chapter 12: Process Synthesis: Putting it All Together
Chapter 13: Polymer MEMS
Chapter 14: Micro Fluidics Applications
Chapter 15: Case Studies of Selected MEMS Products
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