MEMS and NEMS : systems, devices, and structures / by Sergey Edward Lyshevski

By: Lyshevski, Sergey EdwardMaterial type: TextTextPublication details: New Delhi : CRC Press, 2010, 2002cDescription: 461 p. : ill. ; 25 cmISBN: 0849312620 (pbk)Subject(s): Microelectromechanical systemsDDC classification: 621.381
Contents:
1. Overview and Introduction -- 2. New Trends in Engineering and Science: Micro- and Nanoscale Systems -- 3. Fundamentals of MEMS Fabrication -- 4. Devising and Synthesis of MEMS and NEMS -- 5. Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures -- 6. Nanosystems, Quantum Mechanics, and Mathematical Models -- 7. Control of Microelectromechanical Systems -- 8. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided-Design of MEMS.
Summary: The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Books Books Namal Library
Electrical Engineering 		621.381 LYS-M 2010 808 (Browse shelf (Opens below)) Available 808
Total holds: 0
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621.381 LIA-M 2012 4225 Microwave devices and circuits / 621.381 LIU-F 2012 2778 Foundations of MEMS / 621.381 LIU-F 2013 3999 Foundations of MEMS / 621.381 LYS-M 2010 808 MEMS and NEMS : systems, devices, and structures / 621.381 MAL-D 2011 120 Data Converters / 621.381 MAL-D 2011 1184 Data Converters / 621.381 MAM-F 2017 10517 Fundamentals of power supply design:

Index included

1. Overview and Introduction -- 2. New Trends in Engineering and Science: Micro- and Nanoscale Systems -- 3. Fundamentals of MEMS Fabrication -- 4. Devising and Synthesis of MEMS and NEMS -- 5. Modeling of Micro- and Nanoscale Electromechanical Systems, Devices, and Structures -- 6. Nanosystems, Quantum Mechanics, and Mathematical Models -- 7. Control of Microelectromechanical Systems -- 8. Case Studies: Synthesis, Analysis, Fabrication, and Computer-Aided-Design of MEMS.

The technological revolution precipitated by micro- and nanoelectromechanical systems (MEMS and NEMS) will change the nature of most human-made structures, devices, and systems. This book brings

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