Introductory MEMS : fabrication and applications / by Thomas M. Adams and Richard A. Layton
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TextPublication details: New Delhi : Springer, 2010cDescription: xv, 444 p. : ill. (some col.) 24cmISBN: 9788132206637 (pbk)Subject(s): Microelectromechanical systemsDDC classification: 621. | Item type | Current library | Call number | Status | Date due | Barcode | Item holds |
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Namal Library Electrical Engineering | 621. ADA-I 2010 1145 (Browse shelf (Opens below)) | Available | 1145 |
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| 620 PHA-Q 2012 6320 Quality engineering using robust design / | 620 SEB-P 2004 3910 Process dynamics and control / | 620 SUH-A 2001 6138 Axiomatic design : | 621. ADA-I 2010 1145 Introductory MEMS : | 621. EE202029 FYP: Standalone hydro power generation unit / | 621 ALC-I 2011 3761 Introduction to mechatronics and measurement systems | 621 ALC-I 2011 8486 Introduction to mechatronics and measurement systems |
Index incuded
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures -- micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
This is a practical introduction to MEMS for advanced undergraduate and graduate students. It describes sensors, actuators, and microfluidics, and their relationship with MEMS. The book has a tested
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