TY  - BOOK
AU  - Ghandhi,Sorab Khushro
TI  - VLSI fabrication principles: silicon and gallium arsenide 
SN  - 9788126517909 (pbk)
U1  - 621.3815 
PY  - 1994///
CY  - New York
PB  - Wiley
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Silicon
KW  - Gallium arsenide
N1  - Includes bibliographical references and index; CONTENTS
Chapter 1: Material Properties
Chapter 2: Phase diagrams and solid stability
Chapter 3: Crystal growth and doping
Chapter 4: Diffusion
Chapter 5: Epitaxy
Chapter 6: Ion Implantation
Chapter 7: Native Films
Chapter 8: Deposited films
Chapter 9: Etching and cleaning
Chapter 10: Lithographic process
Chapter 11: Device and Circuit fabrication

ER  -