TY  - BOOK
AU  - May,Gary S.
AU  - Sze,S.M.
TI  - Fundamentals of semiconductor fabrication
SN  - 9788126532605 (pbk)
U1  - 621.3815 
PY  - 2004///
CY  - New Delhi
PB  - Wiley
KW  - Semiconductors
KW  - Design and construction
KW  - Integrated circuits
N1  - Includes bibliographical references and index; CONTENTS
Chapter 1: Introduction
Chapter 2: Crystal growth
Chapter 3: Silicon oxide
Chapter 4: Photo Lithography
Chapter 5: Etching
Chapter 6: Diffusion
Chapter 7: Ion implantation
Chapter 8: Film deposition
Chapter 9: Process integration
Chapter 10: IC manufacturing
Chapter 11: Future trends and challenges
ER  -