Foundations of MEMS /
Liu, Chang, Ph.D.
Foundations of MEMS / by Chang Liu. - 2nd ed. - New Delhi : Pearson Education, 2013 - 576 p. : ill. ; 24 cm.
Includes bibliographical references and index.
CONTENTS
Chapter 1: Introduction
Chapter 2: First Pass Introduction to Micro-fabrication
Chapter 3: Review of Essential Electrical and Mechanical concepts
Chapter 4: Electrostatic Sensing and Actuation
Chapter 5: Thermal Sensing and Actuation
Chapter 6: Piezoresistive Sensors
Chapter 7: Piezoelectric Sensing and Actuation
Chapter 8: Magnetic Actuation
Chapter 9: Summary of Sensing and Actuation Methods
Chapter 10: Bulk Micro-machining and Silicon An isotropic Etching
Chapter 11: Surface Micro-machining
Chapter 12: Process Synthesis: Putting it All Together
Chapter 13: Polymer MEMS
Chapter 14: Micro Fluidics Applications
Chapter 15: Case Studies of Selected MEMS Products
9788131764756(pbk)
2010054087
Microelectromechanical systems.
621.381 / LIU-F 2013 3999
Foundations of MEMS / by Chang Liu. - 2nd ed. - New Delhi : Pearson Education, 2013 - 576 p. : ill. ; 24 cm.
Includes bibliographical references and index.
CONTENTS
Chapter 1: Introduction
Chapter 2: First Pass Introduction to Micro-fabrication
Chapter 3: Review of Essential Electrical and Mechanical concepts
Chapter 4: Electrostatic Sensing and Actuation
Chapter 5: Thermal Sensing and Actuation
Chapter 6: Piezoresistive Sensors
Chapter 7: Piezoelectric Sensing and Actuation
Chapter 8: Magnetic Actuation
Chapter 9: Summary of Sensing and Actuation Methods
Chapter 10: Bulk Micro-machining and Silicon An isotropic Etching
Chapter 11: Surface Micro-machining
Chapter 12: Process Synthesis: Putting it All Together
Chapter 13: Polymer MEMS
Chapter 14: Micro Fluidics Applications
Chapter 15: Case Studies of Selected MEMS Products
9788131764756(pbk)
2010054087
Microelectromechanical systems.
621.381 / LIU-F 2013 3999