Foundations of MEMS / (Record no. 3071)

MARC details
000 -LEADER
fixed length control field 01359cam a22002414a 4500
001 - CONTROL NUMBER
control field 16617020
003 - CONTROL NUMBER IDENTIFIER
control field OSt
005 - DATE AND TIME OF LATEST TRANSACTION
control field 20191202190342.0
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 110120s20132011ii a g b 001 0 eng
010 ## - LIBRARY OF CONGRESS CONTROL NUMBER
LC control number 2010054087
020 ## - INTERNATIONAL STANDARD BOOK NUMBER
International Standard Book Number 9788131764756(pbk)
040 ## - CATALOGING SOURCE
Transcribing agency NCL
082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.381
Item number LIU-F 2013 3999
100 1# - MAIN ENTRY--PERSONAL NAME
Personal name Liu, Chang,
Titles and words associated with a name Ph.D.
245 1# - TITLE STATEMENT
Title Foundations of MEMS /
Statement of responsibility, etc. by Chang Liu.
250 ## - EDITION STATEMENT
Edition statement 2nd ed.
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT)
Place of publication, distribution, etc. New Delhi :
Name of publisher, distributor, etc. Pearson Education,
Date of publication, distribution, etc. 2013
300 ## - PHYSICAL DESCRIPTION
Extent 576 p. :
Other physical details ill. ;
Dimensions 24 cm.
504 ## - BIBLIOGRAPHY, ETC. NOTE
Bibliography, etc Includes bibliographical references and index.
505 ## - FORMATTED CONTENTS NOTE
Formatted contents note CONTENTS<br/>Chapter 1: Introduction<br/>Chapter 2: First Pass Introduction to Micro-fabrication<br/>Chapter 3: Review of Essential Electrical and Mechanical concepts<br/>Chapter 4: Electrostatic Sensing and Actuation<br/>Chapter 5: Thermal Sensing and Actuation<br/>Chapter 6: Piezoresistive Sensors <br/>Chapter 7: Piezoelectric Sensing and Actuation<br/>Chapter 8: Magnetic Actuation<br/>Chapter 9: Summary of Sensing and Actuation Methods<br/>Chapter 10: Bulk Micro-machining and Silicon An isotropic Etching<br/>Chapter 11: Surface Micro-machining<br/>Chapter 12: Process Synthesis: Putting it All Together<br/>Chapter 13: Polymer MEMS<br/>Chapter 14: Micro Fluidics Applications<br/>Chapter 15: Case Studies of Selected MEMS Products<br/><br/><br/> <br/>
650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name as entry element Microelectromechanical systems.
942 ## - ADDED ENTRY ELEMENTS (KOHA)
Source of classification or shelving scheme
Koha item type Books
Holdings
Withdrawn status Lost status Source of classification or shelving scheme Damaged status Not for loan Home library Current library Shelving location Date acquired Total Checkouts Full call number Barcode Date last seen Price effective from Koha item type Source of acquisition Cost, normal purchase price Inventory number
          Namal Library Namal Library Electrical Engineering 12/11/2013   621.381 LIU-F 2012 2778 0002778 12/11/2013 12/11/2013 Books      
          Namal Library Namal Library Electrical Engineering 01/29/2014   621.381 LIU-F 2013 3999 0003999 01/29/2014 01/29/2014 Books Allied Book Company 628.00 Bill no. 1538