Fundamentals of semiconductor fabrication / by Gary S. May, Simon M. Sze.
Material type: TextPublication details: New Delhi : Wiley, c2004Description: xiii, 305 p. : ill. ; 26 cmISBN: 9788126532605 (pbk)Subject(s): Semiconductors -- Design and construction | Integrated circuits -- Design and constructionDDC classification: 621.3815
Contents:
CONTENTS
Chapter 1: Introduction
Chapter 2: Crystal growth
Chapter 3: Silicon oxide
Chapter 4: Photo Lithography
Chapter 5: Etching
Chapter 6: Diffusion
Chapter 7: Ion implantation
Chapter 8: Film deposition
Chapter 9: Process integration
Chapter 10: IC manufacturing
Chapter 11: Future trends and challenges
Item type | Current library | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|
Books | Namal Library Electrical Engineering | 621.3815 MAY-F 2011 3822 (Browse shelf (Opens below)) | Available | 0003822 |
Total holds: 0
Includes bibliographical references and index.
CONTENTS
Chapter 1: Introduction
Chapter 2: Crystal growth
Chapter 3: Silicon oxide
Chapter 4: Photo Lithography
Chapter 5: Etching
Chapter 6: Diffusion
Chapter 7: Ion implantation
Chapter 8: Film deposition
Chapter 9: Process integration
Chapter 10: IC manufacturing
Chapter 11: Future trends and challenges
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